Ocean Insight teamed with GlobalFoundries, a supplier of semiconductor solutions, to improve processes in support of emerging electronics technologies such as 5G and the Internet of Things.
Semiconductor device fabrication is a sophisticated process that requires precision in every facet of manufacturing. Maintaining quality and minimizing wafer loss requires contaminant-free gases and accurate gas mixtures, endpoint detection for plasma cleaning of chambers, and precisely timed deposition and etching endpoint detection.
Traditional methods of monitoring semiconductor chamber cleaning, deposition and etching processes have led to lower wafer yields and chamber degradation. Now, manufacturers can utilize optical emission spectroscopy (OES) and machine learning for precise, high speed monitoring of processes, resulting in higher quality semiconductor materials for demanding new uses in electronics and nanotechnology.